증착 :  3 Organic Chamber(6 source/ch) – Source port 8EA
1 Metal chamber (4 source/ch)

봉지 :  Glove Box (4 glove)

물류 :  Load lock, Transfer, Flip

• Organic(Host) ≤± 2 %
• Organic(Dopant) ≤± 3 %
• Metal ≤± 5 %

• Organic(Host) 1.0 Å/s ±2 %
• Organic(Dopant) 0.1 Å/s ±3 %
• Metal 0.5 Å/s ±5 %